IC mould " clean surface " implementation technology breakthrough

This year, 3 machine tools that group of Er of rice of strange summer of Swiss GF A lays through the banner -- CUT1000OilTech exceeds nicety of machine tool of cut of silk thread of don't go yet of rigid numerical control, FO350MS machine tool of figuration of numerical control electric spark, MIKRONHSM500LPP exceeds machining center of milling of accurate high speed, roll out the integral solution of IC mould first. Among them, be aimed at IC mould technically " clean surface " applied function is announced first. GF A Jixia Mill general this function is compositive in FO350MS nicety on machine tool of figuration of numerical control electric spark, become the world to go up most the company that achieves technical breakthrough to this core problem first. China holds semiconductor to make industrial half of country since since semiconductor was born 1958, had obtained flying development to today; From original only a logistic unit arrives now inside the semiconductor chip of size of a finger compositive 20 million 100 million logic is unit. Can say, each respects that live in us at present, semiconductor product nowhere is absent, arrive as a child all sorts of electron products, arrive greatly car plane, have their presence. Semiconductor industry chain is very long, as a whole, euramerican hold advanced position, make main concentration be in Asian area, among them Chinese role is more and more important, had exceeded 50% . To semiconductor cell production company, complex semiconductor component, for instance down-lead frame and relevant semiconductor are enclosed, ask " 0 " production of blemish big batch. Graph 1 function product: These are to use three-dimensional presswork the product that plant production comes out, material is plastic Accura 48HTR(left on) , accura Extreme (right go up) , duraform HST (left below) with Accura Greystone (right below) . These material have the good performance such as accuracy, rigid, hear resistance and long-term stability. Enclose a mould mediumly with chain is being produced in semiconductor only (ICCavitybar) for exemple. As a whole, the technology of ICcavitybar asks to have: Ra0 of exterior surface roughness.

1 ～ 2.

2 μ M, 5 μ of dimension precision ± M, 5 ～ of ± of step pitch precision 10 μ M, bottom an internal angle is less than 0.

1mm. And for the die manufacturer to down-lead frame, the design trend of more bracket amounts, less bracket space forces the production of down-lead frame product to raise treatment requirement ceaselessly. Create the treatment demand in the industry according to semiconductor, the much stage machine tool of GF A strange Xia Mier and solution, make in semiconductor mould in, it is especially in down-lead frame and the production that enclose a mould, producing main effect. Ajixiamier rolls out IC mould to make first " complete solution " the treatment demand that answers a client to rise ceaselessly, GF A is strange this year Xiamier with " electron yuan the expert solution of parts of an apparatus " give priority to a problem, rolled out first for die manufacturer " complete solution " concept. Thirdly machine tool of stage high end -- CUT1000OilTech exceeds nicety of machine tool of cut of silk thread of don't go yet of rigid numerical control, FO350MS machine tool of figuration of numerical control electric spark, MIKRONHSM500LPP exceeds machining center of milling of accurate high speed to be able to finish an electron yuan all core technology that mould of parts of an apparatus makes. Electric treatment machine tool uses " cutting tool " electrode is crucial to enclosing the treatment of the mould, because enclose treatment of on the mould many point, the dimension precision of each point, position precision and important electrode surface quality affect final treatment quality directly. So, the machining center machine tool of high quality is very main to IC die manufacturer. Because each axis provides support system of handlers of linear electric machinery, OSS,MIKRONHSM500LPP exceeds machining center of milling of accurate high speed, can undertake the most serious treatment is controlled, achieve freeboard precision, the production of electrode of the high accuracy that finish, assure to be hit with this electrode thereby model antrum has perfect positional precision. Electric treatment machine tool is to enclose mould surface to assure finally of quality finally, machine tool of figuration of electric spark of FO350MS rigid numerical control is contained inside the machines in the light of IC mould special technology of buy (later development discusses) in detail, can undertake about a hundred model antrum while treatment. CUT1000OilTech exceeds machine tool of cut of silk thread of don't go yet of rigid numerical control to have real time is monitored and corrective line bends, dynamic outline is optimized and the function such as corner of an internal angle, can have the treatment of die of essence of life. IC mould " clean surface " implementation technology is broken through to IC die manufacturer, normally IC encloses a mould not to need first-rate exterior surface roughness, but the exterior consistency with first-rate need and exterior quality. What in above GF Ajixiamier presents " complete solution " in, GF A strange Xia Mier was announced first compositive at FO350MS nicety in machine tool of figuration of numerical control electric spark " ICmaster " module, came true to achieve IC mould " clean surface " technical breakthrough. In the production that encloses a mould in IC, mould surface quality is crucial to craft of drawing of patterns. If mould surface quality is not high, in process of several drawing of patterns, mould surface can keep dirt, and lower mould life. Previously, to solve this problem, pattern company thinks up the material in a wear-resisting, in an attempt to prolongs the service life of the mould, but this take temporary solution not effect a permanent cure. Because, if former mould surface quality is bad, behave the indentation to have a lot of namely in microcosmos, although besmear in the surface,go up so material of a wear-resisting, also can keep a lot of dirt that enclose material on this material, lowered the life of the mould thereby. Later, as a kind new-style environmental protection encloses the occurrence of material, this problem is more and more serious. Mould life is very brief, the time that the mould defends is longer and longer, the manufacturing cost that cause is higher and higher, this problem that hang and did not solve had arrived to be not solve cannot degree. The problem that encounters in client application also is GF A Jixia Mi Eryi's straight technology attention. The Swiss experts of GF A strange Xia Mier used the time of 6 months, to survey of spot of IC pattern business, captured finally this one difficult problem. Nowadays, in machine tool of figuration of electric spark of FO350MS rigid numerical control, have compositive " ICmaster " module, the user carries face plate operation, need a few to key in an instruction simply only, can operate a machine tool to achieve " clean surface " . This kind is had " clean surface " the mould is in process of drawing of patterns, enclose material to won't stay in apparently, prolonged mould service life, improved the manufacturing efficiency of the enterprise thereby. Integrated above place states case of NextpageIC mould treatment, ajixiamier realizes IC mould " clean surface " technical breakthrough, rolled out IC mould to machine complete solution with 3 machine tools. We explain below through an example: Graph 2 it is workpiece and electrode graph. Graph 2 workpiece and electrode graph. ● electrode material: Black lead EDM4; ● antrum amount: 288; ● antrum dimension: 1.

2mm × 2.

9mm; ● machines deepness: 0.

7mm; ● surface roughness: Ra0.

4 μ M (VDI12) ; ● position precision: ± 2.

5 μ M. The difficulty of this workpiece reachs the requirement to the machine tool: 1, very tall machine tool precision (M of μ of dimension precision 0-5, positional precision ± 2.

5 μ M) , the most important is stability, because total length is achieved,be more than 100cm, and model antrum is very much, no matter high speed milling machine machines electrode or electric spark machine tool final, assure numerous model antrum precision is very big challenge; 2, exterior surface roughness and exterior consistency. Ra0 of surface roughness of surface of this work requirement.

4 μ M, look not quite tall, but have needed to notice at 2 o'clock, it is electrode material it is black lead, black lead is opposite copper, very difficult treatment gives very tall surface surface roughness. 2 be 288 model antrum should be machined at the same time, assure so much model the oneness of the exterior surface roughness of antrum is absolutely not simple, all model antrum surface roughness should assure to be in Ra0.

3 ～ 0.

Inside the public errand of 5 μ M; 3, exterior quality. Mention above, IC encloses a mould to reach almost slashing degree to exterior quality. And should be in 288 model the exterior quality with be finished so good inside antrum, absolutely not simple. Graph the first medium piece of 3 metallographic that are the mould appearance that achieves before pursue (enlarge 200 times) , the appearance that the 2nd piece of graph is the grain that the discharge surface that at present IC encloses mould place to ask reachs (magnify as much 200 times) . Because have bit of similar oriental cherry, so, SUKARA grain is called inside Japanese client, s-EDM grain is made in Korea, ajixiamier calls CleanSurface clean surface; Graph 3 on the metallographic that the graph is the mould appearance that achieves before pursues (enlarge 200 times) , the appearance that next graphs are the grain that the discharge surface that at present IC encloses mould place to ask reachs (magnify as much 200 times) . 4, electrode loss. Because the production demand of electrode is very high, such, the cost of electrode is corresponding very tall. So, to electric treatment machine tool character, if can reduce the loss of electrode, can reduce production cost greatly. Ajixiamier is early a few years ago had made a lot of effort in this respect, the IQ that present achievement is the black lead electrode that deploys on FO350MS machine tool " 0 " loss power source, it to cupreous electrode as much applicable. Because of IQ " 0 " consume power source this module, we can regard electrode as " permanent " electrode. Specific to this example, we completed full treatment with an electrode, this is in before is unthinkable. GF A strange Xia Mier exceeds nicety of machine tool of cut of silk thread of don't go yet of rigid numerical control, FO350MS with CUT1000OilTech machine tool of figuration of numerical control electric spark, MIKRONHSM500LPP exceeds machining center of milling of accurate high speed of 3 machine tools " assorted fist " , can faultlessly overfulfil electrode and the overall demand that workpiece machines, present IC mould to make " complete solution " . CNC Milling